Description:This book broadens the scope from 'conventional' MEMS to include issues relating to bioMEMS, NEMS, and molecular machines and the interfaces between these fields. Although originally based in silicon microelectronics technology, the reach of NEMS and MEMS is now extending to new materials such as diamond, metals and polymers, with various fabrication techniques. New materials and applications envisioned for NEMS and MEMS introduce a number of processing and packaging issues, such as biocompatibility. They also provide potential to study in situ thin-film properties with extraordinary resolution. Properly designed structures fabricated alongside NEMS and MEMS structures and integrated with advanced metrology methods provide unprecedented resolution for measuring material property. The book improves understanding of materials behavior and device issues at the micro-, nano- and molecular scale as well as the behavior and interface between micro-, nano- and molecular devices. Topics micro- and nanofluids; nanotechnology and molecular machines; mechanical properties and characterization; alternative micro- and nanofabrication techniques; and surface engineering issues in MEMS structures and devices.We have made it easy for you to find a PDF Ebooks without any digging. And by having access to our ebooks online or by storing it on your computer, you have convenient answers with Nano and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines: Volume 741 (Materials Research Society Symposium Proceedings). To get started finding Nano and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines: Volume 741 (Materials Research Society Symposium Proceedings), you are right to find our website which has a comprehensive collection of manuals listed. Our library is the biggest of these that have literally hundreds of thousands of different products represented.
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1558996788
Nano and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines: Volume 741 (Materials Research Society Symposium Proceedings)
Description: This book broadens the scope from 'conventional' MEMS to include issues relating to bioMEMS, NEMS, and molecular machines and the interfaces between these fields. Although originally based in silicon microelectronics technology, the reach of NEMS and MEMS is now extending to new materials such as diamond, metals and polymers, with various fabrication techniques. New materials and applications envisioned for NEMS and MEMS introduce a number of processing and packaging issues, such as biocompatibility. They also provide potential to study in situ thin-film properties with extraordinary resolution. Properly designed structures fabricated alongside NEMS and MEMS structures and integrated with advanced metrology methods provide unprecedented resolution for measuring material property. The book improves understanding of materials behavior and device issues at the micro-, nano- and molecular scale as well as the behavior and interface between micro-, nano- and molecular devices. Topics micro- and nanofluids; nanotechnology and molecular machines; mechanical properties and characterization; alternative micro- and nanofabrication techniques; and surface engineering issues in MEMS structures and devices.We have made it easy for you to find a PDF Ebooks without any digging. And by having access to our ebooks online or by storing it on your computer, you have convenient answers with Nano and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines: Volume 741 (Materials Research Society Symposium Proceedings). To get started finding Nano and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines: Volume 741 (Materials Research Society Symposium Proceedings), you are right to find our website which has a comprehensive collection of manuals listed. Our library is the biggest of these that have literally hundreds of thousands of different products represented.